| Specifications/ Standard | Precision Grade | Factory Standard | Commercial Grade |
| Dimensional tolerance | +/-0.01mm | +/-0.03mm | +/-0.05mm |
| Thickness tolerance | +/-0.005mm | +/-0.02mm | +/-0.05mm |
| Radius | Infinity | ||
| Flatness | PV<1/50L | PV<1/10L | PV<1/4L |
| Surface quality | 5-1 | 10-5 | 40-20 |
| Roughness | RMS<0.3nm | RMS<0.8nm | RMS<1nm |
| Parallelism | <2arcsec | <10arcmin | <30arcmin |
| Chamfer | <0.05mm x 45deg | <0.15mm x 45deg | <0.3mm x 45deg |
| Coating | AR coating/Dielectric coating/Mirror coating | ||