Specifications/ Standard | Precision Grade | Factory Standard | Commercial Grade |
Dimensional tolerance | +/-0.01mm | +/-0.03mm | +/-0.05mm |
Thickness tolerance | +/-0.01mm | +/-0.02mm | +/-0.05mm |
Radius | Min: 1.1mm, Max: 200000mm | ||
Flatness | 3/-(0.1) | 3/-(0.2) | 3/-(0.5) |
Surface quality | 5-1 | 10-5 | 40-20 |
Roughness | RMS<0.5nm | RMS<1nm | RMS<2nm |
Centering | <10arcsec | <30arcsec | <1arcmin |
Chamfer | <0.05mm x 45deg | <0.15mm x 45deg | <0.3mm x 45deg |
Coating | AR coating/Metal coating/Dielectric coating |