Specifications/ Standard | Precision Grade | Factory Standard | Commercial Grade |
Dimensional tolerance | +/-0.02mm | +/-0.05mm | +/-0.1mm |
Thickness tolerance | +/-0.01mm | +/-0.02mm | +/-0.05mm |
Radius | Infinity | ||
Flatness | PV<1/50L | PV<1/10L | PV<1/4L |
Surface quality | 5-1 | 10-5 | 40-20 |
Roughness | RMS<0.3nm | RMS<0.8nm | RMS<1nm |
Parallelism | <10arcsec | <30arcmin | <1arcmin |
Chamfer | <0.05mm x 45deg | <0.15mm x 45deg | <0.3mm x 45deg |
Coating | Dielectric coating/Mirror coating |