Specifications/ Standard | Precision Grade | Factory Standard | Commercial Grade |
Dimensional tolerance | +/-0.02mm | +/-0.05mm | +/-0.1mm |
Thickness tolerance | +/-0.02mm | +/-0.05mm | +/-0.1mm |
Radius | TBD | ||
Flatness | 3/-(0.2) | 3/-(0.5) | 3/-(1.0) |
Surface quality | 10-5 | 20-10 | 40-20 |
Roughness | RMS<1nm | RMS<2nm | RMS<2nm |
Parallelism | <30arcsec | <1arcmin | <5arcmin |
Chamfer | <0.05mm x 45deg | <0.15mm x 45deg | <0.3mm x 45deg |
Coating | AR coating/Dielectric coating/Beamsplitter coating |