| Specifications/ Standard | Precision Grade | Factory Standard | Commercial Grade |
| Dimensional tolerance | +/-0.02mm | +/-0.05mm | +/-0.1mm |
| Thickness tolerance | +/-0.02mm | +/-0.05mm | +/-0.1mm |
| Radius | TBD | ||
| Flatness | 3/-(0.2) | 3/-(0.5) | 3/-(1.0) |
| Surface quality | 10-5 | 20-10 | 40-20 |
| Roughness | RMS<1nm | RMS<2nm | RMS<2nm |
| Parallelism | <30arcsec | <1arcmin | <5arcmin |
| Chamfer | <0.05mm x 45deg | <0.15mm x 45deg | <0.3mm x 45deg |
| Coating | AR coating/Dielectric coating/Beamsplitter coating | ||