| Specifications/ Standard | Precision Grade | Factory Standard | Commercial Grade |
| Dimensional tolerance | +/-0.02mm | +/-0.05mm | +/-0.1mm |
| Thickness tolerance | +/-0.02mm | +/-0.05mm | +/-0.1mm |
| Radius | Infinity | ||
| Flatness | PV<1/10L | PV<1/2L | PV<1L |
| Surface quality | 20-10 | 40-20 | 60-40 |
| Roughness | RMS<1nm | RMS<2nm | RMS<5nm |
| Parallelism | <10arcsec | <30arcsec | <3arcmin |
| Chamfer | <0.05mm x 45deg | <0.15mm x 45deg | <0.3mm x 45deg |
| Coating | Filter coating | ||